7

Nitrogen implantation in (100)-β-SiC layers grown on Si substrate

Year:
1995
Language:
english
File:
PDF, 1.38 MB
english, 1995
14

Growth of A β-SiC Filli on a Si Substrate by a Direct Carbonization Method

Year:
1991
Language:
english
File:
PDF, 2.11 MB
english, 1991